Ultrafast laser beam shaping for material processing at imaging plane by geometric masks using a spatial light modulator

摘要

We have demonstrated an original ultrafast laser beam shaping technique for material processing using a spatial light modulator (SLM). Complicated and time-consuming diffraction far-field phase hologram calculations based on Fourier transformations are avoided, while simple and direct geometric masks are used to shape the incident beam at diffraction near-field. Various beam intensity shapes, such as square, triangle, ring and star, are obtained and then reconstructed at the imaging plane of an f-theta lens. The size of the shaped beam is approximately 20 mu m, which is comparable to the beam waist at the focal plane. A polished stainless steel sample is machined by the shaped beam at the imaging plane. The shape of the ablation footprint well matches the beam shape. (C) 2015 Elsevier Ltd. All rights reserved.