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Design and analysis of a laser micrometer for undulator gap measurement applications

机译:用于起伏器间隙测量应用的激光千分尺的设计和分析

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In this paper we report the design of a laser micrometer for undulator gap measurement studies. In this scheme, the parallel light emerging from the rotating polygon mirror passes through an F-theta lens makes a vertical line on the image plane. When an object intercepts the line, the interrupted and the uninterrupted light is detected in a DSO through a detector. The beam spot size and the linear velocity of the beam spot on the scan line are the two important parameters of the laser micrometer. The beam spot size measurements show that it is constant along the scan line for a number of RPMs. It measures a constant value at +/- 3 mm to the effective focal length of the F-theta lens. The measurements are verified for two types of objects i.e. solid object and a circular hole and also for an electromagnet undulator. The electromagnet undulator is measured with an accuracy of 3-5 mu m. (C) 2015 Elsevier Ltd. All rights reserved.
机译:在本文中,我们报告了用于波幅测量的激光千分尺的设计。在该方案中,从旋转多面镜出射的平行光穿过F-theta透镜,在像平面上形成一条垂直线。当物体拦截线时,在DSO中通过检测器检测到中断和不中断的光。束斑大小和扫描线上束斑的线速度是激光测微仪的两个重要参数。束斑尺寸测量表明,对于许多RPM,其沿扫描线是恒定的。它可以测量F-theta镜头有效焦距的+/- 3 mm处的恒定值。对两种类型的物体(即固体物体和圆形孔)以及电磁波荡器进行了测量验证。电磁波荡器的测量精度为3-5微米。 (C)2015 Elsevier Ltd.保留所有权利。

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