MEMS microswitch design for high voltage applications and electrical discharge processes for micrometer-scale gaps in an atmospheric pressure air environment.

摘要

Our experimental results demonstrate that a microswitch capable of holding off voltages over 1000 V can be achieved in an air environment at atmospheric pressure, using contact configurations with multiple air gaps, requiring short actuation distances that are compatible with standard MEMS actuators.;We examine electrical discharge current responses between planar polysilicon microstructures, across atmospheric pressure air gaps in the 2 mum to 7 mum range, to determine the physical process of electrical discharge. The effect of shape-related field enhancement is investigated through simulated field distribution and experimental current response for devices with designed variations In electrode tip shape.