Wafer-scale 4H-silicon carbide-on-insulator (4H-SiCOI) platform for nonlinear integrated optical devices

摘要

4H-silicon carbide-on-insulator (4H-SiCOI) serves as a novel and high efficient integration platform for nonlinear optics and quantum photonics. The realization of wafer-scale fabrication of single-crystalline semi-insulating 4H-SiC film on Si (100) substrate using the ion-cutting and layer transferring technique was demonstrated in this work. The thermodynamics of 4H-SiC surface blistering is investigated via observing the blistering phenomenon with a series of implanted fluences and annealing temperatures. Surface tomography and the depth dependent film quality of the 4H-SiC have been extensively studied by employing scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Moreover, X-ray diffraction (XRD) was carried out and the diffraction spectrum reveals a narrow peak with a full width at half maximum (FWHM) of 75.6 arcsec, indicating a good maintenance of the single-crystalline phase for the prepared thin film of 4H-SiC as compared to its bulk counterpart. With the single-crystalline 4H-SiCOI, we have successfully fabricated a micro-ring resonator with a quality factor as high as 6.6 x 10(4). The reported 4H-SiCOI wafer provides a feasible monolithic platform for integrated photonic applications.