Low-Loss TeO2 Waveguides Integrated on a Si3N4 Platform for Active and Nonlinear Optical Devices

摘要

We report on TeO₂-coated Si₃N₄ waveguides with losses down to 0.6 dB/cm at 2 μm These results are a promising step towards realizing scalable, compact and high-performance tellurite glass devices on a silicon nitride platform.