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ZnSSe-based ultra-violet photodiodes with extremely high detectivity

机译:基于ZnSSe的紫外光电二极管,具有极高的检测能力

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A noise study on a set of ZnS_(0.58)Se_(0.42) UV photodiodes with 1 μm thick Al bonding pads selected from a 2″ wafer was carried out. Based on their 1/f noise behaviors, they were divided into three groups. The noise spectral density, impulse response time, bandwidth, responsivity, dark current at reverse bias up to 12 V and zero bias resistance were determined for three typical detectors, i.e. one from each of the three groups. The uneven performance of these detectors is mostly likely due to the different damage level induced in the wire-bonding process. With thicker Al bonding pads of 1.5 μm, a detectivity as high as 7.1 x 10~(14) cm Hz~(1/2)W~(-1) has been achieved.
机译:对一组ZnS_(0.58)Se_(0.42)UV光电二极管进行了噪声研究,该光电二极管具有选自2英寸晶圆的1μm厚的Al键合焊盘。根据它们的1 / f噪声行为,将它们分为三组。对于三个典型的检测器,即三组中的每一个,确定了噪声频谱密度,脉冲响应时间,带宽,响应度,高达12 V的反向偏置下的暗电流和零偏置电阻。这些检测器性能参差不齐的情况很可能是由于引线键合过程中引起的损坏程度不同所致。使用1.5μm的较厚的Al焊盘,可以实现高达7.1 x 10〜(14)cm Hz〜(1/2)W〜(-1)的检测率。

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