Computer numeric control subaperture aspheric surface polishing-microroughness evaluation

摘要

The aim of this work was an investigation of surface microroughness and shape accuracy achieved on an aspheric lens by subaperture computer numeric control (CNC) polishing. Different optical substrates were polished (OHARA S-LAH 58, SF4, ZERODUR) using a POLITEX™ polishing pad, synthetic pitch, and the natural optical pitch. Surface roughness was measured by light interferometer. The best results were achieved on the S-LAH58 glass and the ZERODUR™ using the natural optical pitch. In the case of SF4 glass, the natural optical pitch showed a tendency to scratch the surface. Experiments also indicated a problem in surface form deterioration when using the natural optical pitch, regardless of the type of optical material.