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机译:扫描光束干涉光刻在零差检测中周期性非线性的实时校正
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
Tsinghua University, State Key Laboratory of Tribology, Department of Mechanical Engineering, Beijing, China,Tsinghua University, Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Beijing, China;
scanning beam interference lithography; periodic nonlinearity; homodyne detector; extended Kalman filter;
机译:扫描光束激光干涉光刻系统中光学相位差和基片运动引起的同时误差的实时补偿
机译:扫描光束干涉光刻系统超精密平台偏航误差校正
机译:扫描光束干扰光刻中光束对准的分段线性加权迭代算法
机译:均相锁相干涉仪中非线性误差的实时校正
机译:具有光束扫描功能的周期性微带泄漏波天线。
机译:通过宽光束扫描曝光和自参考对准实现干涉光刻的无限记录长度
机译:用于扫描光束干涉光刻的光束对准和图像测量:制造具有纳米相位精度的光栅