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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Quantitative plasma-fuel and impurity profiling in thick plasma-deposited layers by means of micro ion beam analysis and SIMS
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Quantitative plasma-fuel and impurity profiling in thick plasma-deposited layers by means of micro ion beam analysis and SIMS

机译:借助微离子束分析和SIMS对厚等离子体沉积层中的等离子体燃料和杂质进行定量分析

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The operation of the Joint European Torus (JET) with full-carbon wall during the last decades has proven the importance of material re-deposition processes in remote areas of the tokamak. The thickness of the deposits in shadowed areas can reach 1 mm. The main constituent is carbon, with little inclusion of Inco-nel components. Atomic fractions Be/C and D/C can locally reach 1. Three methods were used to study thick deposits on JET divertor surfaces: (ⅰ) NRA analysis with a 15 μm wide, 3 MeV ~3He ion microbeam on a polished cross section of the layer to determine the concentration distribution of D, Be and C and the distribution of Ni by particle induced X-ray emission; (ⅱ) elastic proton scattering (EPS) from the top of the layers with a broad proton beam at 3.5 and 4.6 MeV. These methods were absolutely calibrated using thick elemental targets, (ⅲ) Depth profiling of D, Be and Ni was done with secondary ion mass spectrometry (SIMS), sputtering the layers from the surface. The three methods are complementary. The thickest layers are accessible only by microbeam mapping of the cross sections, albeit with limited spatial resolution. The SIMS has the best depth resolution, but is difficult for absolute quantification and is limited in accessible depth. The probed depth with proton backscattering is limited to about 30 μm. The combination of all three methods provided a coherent picture of the layer composition. It was possible to correlate the SIMS profiling results to quantitative data obtained by the microbeam method.
机译:在过去的几十年中,全碳纤维墙联合欧洲环面(JET)的运行证明了在托卡马克偏远地区进行材料重新沉积工艺的重要性。阴影区域的沉积物厚度可达到1毫米。主要成分是碳,几乎没有Inco-nel成分。原子分数Be / C和D / C可以局部达到1。三种方法用于研究JET偏滤器表面的厚沉积物:(ⅰ)用15μm宽,3 MeV〜3He离子微束在抛光后的横截面上进行NRA分析。该层通过粒子诱发的X射线发射来确定D,Be和C的浓度分布以及Ni的分布; (ⅱ)用3.5和4.6 MeV的宽质子束从层的顶部进行弹性质子散射(EPS)。这些方法是使用厚元素标靶进行绝对校准的。(D)D,Be和Ni的深度分布图是通过二次离子质谱(SIMS)进行的,从表面溅射出层。这三种方法是互补的。尽管空间分辨率有限,但最厚的层只能通过横截面的微束映射来访问。 SIMS具有最佳的深度分辨率,但难以进行绝对定量,并且可访问深度有限。具有质子反向散射的探测深度被限制为大约30μm。所有这三种方法的组合提供了层组成的连贯图片。可以将SIMS分析结果与通过微束法获得的定量数据相关联。

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