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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment >The application of confocal technology based on polycapillary X-ray optics in surface topography
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The application of confocal technology based on polycapillary X-ray optics in surface topography

机译:基于多毛细管X射线光学共焦技术在表面形貌中的应用

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摘要

A confocal micro-X-ray fluorescence (MXRF) technology based on polycapillary X-ray optics was proposed for determining surface topography. This confocal topography method involves elemental sensitivity and can be used to classify the objects according to their elemental composition while obtaining their surface topography. To improve the spatial resolution of this confocal topography technology, the center of the confocal micro-volume was overlapped with the output focal spot of the polycapillary X-ray, focusing the lens in the excitation channel. The input focal spot of the X-ray lens parallel to the detection channel was used to determine the surface position of the sample. The corresponding surface adaptive algorithm was designed to obtain the surface topography. The surface topography of a ceramic chip was obtained. This confocal MXRF surface topography method could find application in the materials sciences.
机译:提出了一种基于多毛细管X射线光学器件的共聚焦X射线荧光(MXRF)技术来确定表面形貌。这种共聚焦形貌方法涉及元素敏感性,可用于在获得对象表面形貌的同时根据对象的元素组成对对象进行分类。为了提高这种共焦形貌技术的空间分辨率,共焦微体积的中心与多毛细管X射线的输出焦点重叠,将透镜聚焦在激发通道上。平行于检测通道的X射线透镜的输入焦点用于确定样品的表面位置。设计相应的表面自适应算法以获得表面形貌。获得陶瓷芯片的表面形貌。这种共聚焦MXRF表面形貌方法可以在材料科学中找到应用。

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  • 作者单位

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China,The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

    The Key Laboratory of Beam Technology and Material Modification of the Ministry of Education, Beijing Normal University, Beijing 100875, China,College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China,Beijing Radiation Center, Beijing 100875, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Confocal micro-X-ray fluorescence; Polycapillary X-ray optics; Surface topography;

    机译:共聚焦微X射线荧光;多毛细管X射线光学器件;表面形貌;

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