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Development of radiation hard CMOS active pixel sensors for HL-LHC

机译:用于HL-LHC的辐射硬CMOS有源像素传感器的开发

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摘要

New pixel detectors, based on commercial high voltage and/or high resistivity full CMOS processes, hold promise as next-generation active pixel sensors for inner and intermediate layers of the upgraded ATLAS tracker. The use of commercial CMOS processes allow cost-effective detector construction and simpler hybridisation techniques. The paper gives an overview of the results obtained on AMS-produced CMOS sensors coupled to the ATLAS Pixel FE-I4 readout chips. The SOI (silicon-on-insulator) produced sensors by XFAB hold great promise as radiation hard SOI-CMOS sensors due to their combination of partially depleted SOI transistors reducing back-gate effects. The test results include pre-/post-irradiation comparison, measurements of charge collection regions as well as test beam results.
机译:基于商业高压和/或高电阻率全CMOS工艺的新型像素检测器有望作为升级版ATLAS跟踪器内层和中间层的下一代有源像素传感器。商业CMOS工艺的使用允许具有成本效益的检测器构造和更简单的杂交技术。本文概述了在与ATLAS Pixel FE-I4读出芯片耦合的AMS生产的CMOS传感器上获得的结果。由XFAB生产的SOI(绝缘体上硅)传感器由于具有部分耗尽的SOI晶体管的组合可减少背栅效应,因此有望成为辐射坚硬的SOI-CMOS传感器。测试结果包括辐照前/辐照后的比较,电荷收集区域的测量以及测试束的结果。

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