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High-current-density gas ion ribbon beam formation

机译:高电流密度气体离子带束束形成

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Experimental results are presented to demonstrate the possibility of forming extended repetitively pulsed low-energy gaseous ion beams with a notably high current density. The symbiosis of plasma-immersion extraction of ions and their subsequent ballistic focusing in the semi-cylindrical geometry of the focusing system was first used to form a high-density nitrogen and argon ion ribbon beam. The gas-discharge plasma was formed using a hot-cathode-arc discharge-based modified extended source. A nitrogen and argon ion beam was steadily formed at bias potentials of an amplitude up to 1000 V and a pulse duration of 2–80μsat a pulse frequency of 103-104pulses/s. In the experiments, an inverse change in current amplitude of the focused ion beam was observed with respect to the initial nitrogen and argon plasma densities. The change in the current ratio formed by the nitrogen and argon ion beams in comparison with the initial plasma density is associated with the effect of the ion atomic mass on a high-voltage sheath formation near the grid electrode and the ratio of the sheath width and grid cell dimensions. An argon ion beam with a current of 0.35 A and a nitrogen ion beam with a current of 0.6 A at a focused ribbon beam length of 23 cm were obtained by installing a grid focusing system in the form of a partial cylindrical surface (radius 7.5 cm) at 35 cm from the gas-discharge plasma generator output. A decrease in distance to 20 cm ensured an increase in argon ion current to 0.8 A and nitrogen ion current to 1.3 A. The maximum ion current density at a distance that corresponded to the cylindrical grid radius for nitrogen and argon ions exceeded 0.08 A/cm2and 0.05 A/cm2, respectively.
机译:实验结果表明,有可能形成扩展的重复脉冲低能量气态离子束,并具有很高的电流密度。等离子体浸没萃取的共生及其随后在聚焦系统的半圆柱形几何结构中的弹道聚焦首先用于形成高密度的氮和氩离子带状束。使用基于热阴极电弧放电的改性扩展源形成气体放电等离子体。在振幅高达1000 V的偏置电势和2–80μs的脉冲持续时间(脉冲频率为103-104pulses / s)下稳定地形成了氮和氩离子束。在实验中,相对于初始氮和氩等离子体密度,观察到聚焦离子束电流幅度的反向变化。与初始等离子体密度相比,由氮和氩离子束形成的电流比的变化与离子原子质量对栅极附近高压护套形成的影响以及护套宽度和网格单元尺寸。通过以部分圆柱面(半径7.5 cm)的形式安装栅格聚焦系统,获得了聚焦带状束长度为23 cm的电流为0.35 A的氩离子束和电流为0.6 A的氮离子束)在距气体放电等离子体发生器输出35厘米处。距离减小到20 cm可以确保将氩离子电流增加到0.8 A,将氮离子电流增加到1.3A。与氮和氩离子对应的圆柱状栅格半径相对应的距离处的最大离子电流密度超过0.08 A / cm2,并且0.05 A / cm2。

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