半導体化学センサによる微小流路内の多点同時計測に関する研究

摘要

Light-Addressable Potentiometric Sensorrn（LAPS）は、半導体の電界効果を利用した化学セrnンサであ　り、Electrolyte　-Insulator-rnSemiconductor（EIS）構造を持つ。絶縁層にrnSi_3N_4/SiO_2を用いることで、溶液のpHに対してrn感度を持つ。%A novel measurement system for ion concentrations in flow channels was developed using Light-Addressable Potentiometric Sensor (LAPS). When the LAPS sensor substrate is illuminated by several light sources modulated at different frequencies, the output photocurrent contains corresponding frequency components. Multi-point measurement is realized by separating the frequency components by Fourier analysis. The surface potential shift was simultaneously obtained at four measuring points in a flow channel.