Charakterisierung von Kunststoffen fur die Mikrosystemtechnik

摘要

In the field of Microsystem Technology the LIGA-process serves to produce microcomponents of different materials as metals, plastics and ceramics. The plastic material Polymethyl-methacrylate (PMMA) is proved to be good in particular in molding technology. To ensure process security as well as to make it possible to develop new materials the characterisation of the used materials is indispensable. As analytical methods the Size Exclusion Chromatography and the Thermal Analysis are explained. Actual investigations of a plastic material used in molding technology are described and the results are discussed.