Measuring the In-Process Figure, Final Prescription, and System Alignment of Large Optics and Segmented Mirrors Using Lidar Metrology

摘要

The fabrication of large optics is traditionally a slow process, and fabrication capability is often limited by measurement capability. While techniques exist to measure mirror figure with nanometer precision, measurements of large-mirror prescription are typically limited to submillimeter accuracy. Using a lidarinstrument enables one to measure the optical surface rough figure and prescription in virtually all phases of fabrication without moving the mirror from its polishing setup. This technology improves the uncertainty of mirror prescription measurement to the micron-regime.