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机译:在硅微透镜上以光通信波长在Mems扫描仪上制造亚波长光栅
Department of Nanomechanics, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579;
Department of Nanomechanics, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579;
Department of Nanomechanics, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579;
subwavelength gratings; optical scanners; optical communication systems; micro lenses; comb drive actuators;
机译:基于硅亚波长光栅的可见光偏振镜/吸收器:设计和制造
机译:基于硅亚波长光栅的可见光偏振镜/吸收器:设计和制造
机译:用于光学传感的硅亚波长光栅微盘
机译:在光通信波长下MEMS扫描仪硅微透镜对亚晶粒微透镜的制造
机译:用于波长滤波应用的硅壳体亚主光栅结构
机译:用于光学相干层析成像的2轴电热MEMS微扫描仪的设计与制造
机译:用于光学相干断层扫描的2轴电热MEMS微扫描仪的设计与制造