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机译:使用微线放电加工制造顺应性高纵横比硅微电极阵列
Precision Design Laboratory Department of Mechanical Engineering University of Utah Salt Lake City UT 84112 USA;
Precision Design Laboratory Department of Mechanical Engineering University of Utah Salt Lake City UT 84112 USA;
Microsystems Laboratory Department of Electrical and Computer Engineering University of Utah Salt Lake City UT 84112 USA;
Microsystems Laboratory Department of Electrical and Computer Engineering University of Utah Salt Lake City UT 84112 USA;
Precision Design Laboratory Department of Mechanical Engineering University of Utah Salt Lake City UT 84112 USA;
机译:使用微线放电加工制造顺应性高纵横比硅微电极阵列
机译:通过放电加工和化学蚀刻制造微电极阵列
机译:在硅衬底上制备高纵横比光致抗蚀剂衍生的碳微电极阵列的优化工艺
机译:用微电路电加工制造三维硅微电极阵列进行神经应用
机译:对用于晶片切片和高纵横比微加工的p掺杂元素半导体的电火花线切割加工(WEDM)的研究。
机译:用于硅晶片制备线电放电加工中的辅助电极表面改性
机译:通过放电加工和化学蚀刻制造微电极阵列