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机译:使用局部激光加热,通过BCB中间层将硅晶圆级封装到玻璃上
Heriot-Watt University. Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Edinburgh EH14 4AS, UK;
Heriot-Watt University. Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Edinburgh EH14 4AS, UK;
Heriot-Watt University. Applied Optics and Photonics Group, School of Engineering and Physical Sciences, Edinburgh EH14 4AS, UK;
机译:通过BCB中间层将玻璃与硅局部激光接合
机译:通过BCB中间层将玻璃与硅局部激光接合
机译:硅与具有金属夹层的硅之间的激光透射键合,用于晶圆级封装
机译:具有BCB中间层的玻璃到硅的局部激光连接
机译:了解氮化硅(Si(3)N(4))的激光辅助加工中的光纤耦合二极管激光过热。
机译:激光结晶硅膜质量的提高通过玻璃基板上的中间介电层
机译:通过BCB中间层将玻璃与硅局部激光接合