Fabrication of high frequency and low-cost surface-acoustic wave filters using near field phase shift photolithography

摘要

Surface-acoustic wave (SAW) filters operating at frequences in the 1-3 GHz range are widely used in mobile, wireless, cable modem, cellular phone and remote control applications. We fabricated and studied both the basic mold for such devices and a special SAW filter mold with finger patterns with a linewidth of 10 μm. The narrow band gap SAW devices were fabricated using the near field phase shift lithographic (NFPSL) process. The electronic properties of these two types of SAW devices were analyzed. The SAW devices, when excited at the eleven harmonic of their fundamental frequency, were able to operate at about 2.3 GHz.