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机译:通过结合形貌模拟器和蒙特卡洛溅射产量模拟器来模拟聚焦离子束蚀刻
Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany;
Chair of Electron Devices, University of Erlangen-Nuremberg, Cauerstrasse 6, 91058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany Chair of Electron Devices, University of Erlangen-Nuremberg, Cauerstrasse 6, 91058 Erlangen, Germany;
Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany;
sputter etching; simulation; Monte-Carlo; FIB;
机译:紧凑型电子束重离子惯性聚变模拟器纵向和横向耦合运动的数值模拟
机译:具有新的表面反应模型的干法蚀刻地形模拟器:现代
机译:起伏表面,颗粒和大纳米颗粒的形貌效应和单原子离子溅射:溅射产量,有效溅射速率和形貌演变
机译:铝溅射沉积,蚀刻和光刻的新的地形表达模型和3D地形模拟
机译:通过聚焦离子束诱导的选择性混合和湿法化学蚀刻形成光通道波导:设计,制造和表征。
机译:通过模拟器疾病调查问卷测量的物理运动车滚动模拟中探索与模拟器疾病的参与者疾病的决定因素
机译:使用聚焦离子束的表面波纹和离子蚀刻产量:有或没有增强化学,纵横比调节离子蚀刻