机译:绿色光刻技术中源自生物质的无溶剂无水可显影防糖材料
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan,Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan;
Department of Mechanical Systems Engineering, Toyama Prefectural University, Imizu, Toyama 939-0398, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan;
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan;
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan;
Green lithography; Plant products; Nanofabrication; Organic solvent-free; Water solubility; Etch selectivity;
机译:使用源自生物质的可水显影抗蚀剂材料进行的环保电子束光刻
机译:使用源自生物质的可水显影抗蚀剂材料进行的环保电子束光刻
机译:使用基于植物的抗蚀剂材料以及源自生物质和药物的乳果糖衍生物,对70纳米半节距线图案进行UV纳米压印光刻
机译:源自生物质的无溶剂有机糖基透明纳米图案材料,用于绿色光刻的环保光学生物芯片
机译:用于电子束光刻的无机抗蚀剂的开发:新型材料和模拟。
机译:CUO / PMMA聚合物纳米复合材料作为电子束光刻的新型抗蚀剂材料
机译:不可食用的基于纤维素的生物质抗蚀剂材料适合于用于电子束光刻的水基处理
机译:真菌和代谢工程中生物质衍生糖的分解代谢作为有机酸生产的工具。