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机译:电热致动碳化硅MEMS谐振器的压电感应
Institute for Integrated Micro and Nano Systems, The University of Edinburgh, West Mains Road, Edinburgh EH9 3JF, United Kingdom,Department of Marine Electronics and Communications, Faculty of Maritime Studies Rijeka, University of Rijeka, Studentska ulica 2, HR-51000 Rijeka, Croatia;
Institute for Integrated Micro and Nano Systems, The University of Edinburgh, West Mains Road, Edinburgh EH9 3JF, United Kingdom;
Institute for Integrated Micro and Nano Systems, The University of Edinburgh, West Mains Road, Edinburgh EH9 3JF, United Kingdom;
MEMS resonator; Silicon carbide; Piezoelectric sensing; Electrothermal actuation; Tuning;
机译:电热致动且压电感应的碳化硅可调MEMS谐振器
机译:可调谐MEMS悬臂谐振器通过电热驱动和压电感应
机译:电热驱动碳化硅可调MEMS谐振器
机译:基于压电谐振的基于记忆谐振器的滤波器的电热致动
机译:锆酸钛酸铅薄膜,用于压电激励和MEMS谐振器传感。
机译:Q-系数提高薄膜压电对硅MEMS谐振器通过呼吸晶体反射器复合结构
机译:压电传感电热驱动碳化硅mEms谐振器