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机译:具有双膜镜的MEMS法布里-珀罗干涉仪,可改善镜面平行度
Microsystems and Nanotechnologies Department, Corporate Research Division, Robert Bosch GmbH, Renningen, Germany;
Institute for Applied Physics, Karlsruhe Institute of Technology, Karlsruhe, Germany;
Microsystems and Nanotechnologies Department, Corporate Research Division, Robert Bosch GmbH, Renningen, Germany;
Engineering Components Video Department, Chassis Systems Control Division, Robert Bosch GmbH, Leonberg, Germany;
Institute for Applied Physics, Karlsruhe Institute of Technology, Karlsruhe, Germany;
Mirrors; Substrates; Silicon; Micromechanical devices; Refractive index; Optical device fabrication;
机译:广角分镜米歇尔森风成像干涉仪对两个镜的平行度的调整
机译:具有时变基数的法布里-珀罗干涉仪的传递函数:第二部分。固定镜像模式。 “超慢”镜面振荡模式
机译:动镜对干涉仪的原理和双动镜的倾斜公差
机译:基于双膜硅/空气镜的可调宽带膜法布里-珀罗近红外滤波器
机译:在长波长红外区域中基于MEMS的可调谐法布里 - 珀罗干涉仪滤波器的设计,仿真,制造和表征
机译:基于MEMSFabry-Pérot干涉仪的有源高光谱传感器
机译:具有可变测量镜的差分正交 - Pérot干涉仪的研究