Fabry-Pérot interferometer and method for manufacturing a Fabry-Pérot interferometer

摘要

The invention relates to a Fabry-Perot interferometer (11 to 16) with a carrier device (2) which has a substrate section (21) and a frame device (22), a mirror carrier (3) being provided with a plurality of spring elements (41 to 45) is fastened to the frame device (22), a first mirror device (51) being arranged on the substrate section (21), and a second mirror device (52) facing the first mirror device (51) and spaced apart therefrom on the mirror support ( 3) is arranged; and an actuator device (6) which is designed to change a distance between the first mirror device (51) and the second mirror device (52) by acting on the spring elements (41 to 45).