机译:利用三轴时间切换FM MEMS加速度计解决FSR与偏移漂移的折衷
Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy;
Analog and MEMS Group, STMicroelectronics, Cornaredo, Italy;
Analog and MEMS Group, STMicroelectronics, Cornaredo, Italy;
Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy;
Resonant frequency; Thermal stability; Accelerometers; Resonators; Acceleration; Micromechanical devices; Tuning;
机译:低成本三轴MEMS加速度计在强震动地震中的适用性:LIS331DLH(iPhone)加速度计的测试
机译:具有可编程增益嵌入式ADC的SC接口,用于单片三轴3D堆叠式电容MEMS加速度计
机译:具有CMOS MEMS过程的单片三轴加速度计,晶圆级封装
机译:单谐振器,时间切换,低失调漂移z轴FM MEMS加速度计
机译:开发三轴MEMS加速度计。
机译:用于三轴高<内联公式>