Developing yield modeling and defect budgeting for 0.25 μm and beyond

摘要

The defect reduction section of the 1997 revision of The National Technical Roadmap for Semiconductors (NTRS) addresses the entire yield learning process, including the impacts on device performance and reliability. The four focus topics—yield modeling and defect budgeting, defect detection, defect sources and mechanisms, and defect prevention and elimination— correspond with the learning cycle typical of yield engineering and defect reduction. The goal of the yield model and defect budget (YMDB) team is to understand how defect sources in pro- duction equipment and environments relate to electrical faults in semiconductor devices. This team has established equipment, electrical, and process defect budgets to guide future defect reduction requirements.