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Contact stiffness depth-sensing indentation: Understanding of material properties of thin films attached to substrates

机译:接触刚度深度感应压痕:了解附着在基板上的薄膜的材料特性

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The classic version of the depth-sensing indentation techniques assumes the estimation of the elastic contact modulus of a material sample by measuring the slope (the contact stiffness) of the initial part of the unloading branch of the force-displacement curve. This approach assumes that the curve at loading reflects both elastic and plastic deformations of the material, while the unloading is taking place elastically. Therefore, neglecting the plastic deformations, one can assume that the structure of the material is the same at both branches and the assumptions of the Hertz-type contact theory are valid for the unloading branch. However, the contact problem for an elastic film attached to a substrate depends on the properties of the substrate. Hence, the film contact modulus is usually estimated by measuring the slopes of the initial unloading force-displacement curves obtained for different maximal values of indentation depth, and fitting the experimental points by various empirical analytical dimensionless functions of the ratio between the contact radius, a, and the layer thickness, t. Here, analytical analysis of contact problems for coated materials is performed. Both re-scaling and asymptotic techniques are employed. Asymptotic analysis of the contact at the small-scale indentation range (the ratioa/t is small) shows that the formula of the contact stiffness derived for an elastic half-space, has to be multiplied by the so-called indentation scaling factor that is a function of alt. Thus, the asymptotic approach allows us to take into account analytically the substrate effect. The analytical fitting function obtained agrees with both some known semi-empirical functional forms and the published experimental results on depth-sensing nanoindentation of thin metallic layers, while the function is in a disagreement with results obtained for inhomogeneous films of brittle materials such as coals. It is argued that the disagreement is caused by structural transformations (crushing) of the coals during loading. (C) 2017 Elsevier Ltd. All rights reserved.
机译:深度感应压痕技术的经典版本假定通过测量力-位移曲线的卸载分支的初始部分的斜率(接触刚度)来估计材料样品的弹性接触模量。该方法假定加载时的曲线反映了材料的弹性变形和塑性变形,而卸载则是弹性发生的。因此,忽略塑性变形,可以假设材料的结构在两个分支都是相同的,并且赫兹接触理论的假设对于卸载分支是有效的。但是,附着在基材上的弹性膜的接触问题取决于基材的特性。因此,通常通过测量针对不同压痕深度最大值获得的初始卸载力-位移曲线的斜率,并通过各种经验分析无量纲函数拟合接触半径, ,层厚度t。在此,对涂层材料的接触问题进行分析分析。重新缩放和渐近技术都被采用。在小尺寸压痕范围(比率a / t小)下的接触的渐近分析表明,对于弹性半空间得出的接触刚度的公式必须乘以所谓的压痕比例因子,即alt的功能。因此,渐近方法使我们能够分析地考虑底物效应。所获得的解析拟合函数与某些已知的半经验函数形式以及已发布的有关金属薄层深度感测纳米压痕的实验结果均相符,而该函数与脆性材料(例如煤)的不均匀薄膜所获得的结果不一致。有人认为,分歧是由于装煤过程中煤的结构转变(破碎)引起的。 (C)2017 Elsevier Ltd.保留所有权利。

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