Nanoindentation and nanoscratch measurements on silicone thin films synthesized by pulsed laser ablation deposition (PLAD)

摘要

Nanoindentation and nanoscratch studies were conducted on silicone thin films synthesized by pulsed laser ablation deposition (PLAD). The nanoindentation studies showed that the modulus of the silicone films varied as a function of the energy density of deposition. The modulus values measured for PLAD silicone films were in the range of 1-6 GPa compared to 5-10 MPa reported for a typical silicone elastomer. Nanoscratch measurements also showed that PLAD silicone films exhibited much greater scratch resistance compared to silicone elastomer. These studies demonstrated that, even for low energy density depositions, the PLAD process can produced films which were are stronger and more abrasion resistant than conventional cross-linked silicone elastomers.