Determination of vapour pressure and standard enthalpies of sublimation and vapourisation of N, N'-ethylenebis(2,4-pentanedion-iminoato)nickel(II) by a TG-based transpiration method

摘要

In order to identify a volatile metallo-organic precursor for the deposition of nickel films for CVD applications, equilibrium vapour pressure (p_e) measurements were carried out on a N,N' -ethylenebis(2,4-pentanedion-iminoato)nickel(II) (Ni[(acac)_2en]) by employing a TG-based transpiration method over the range 406 to 495 K leading to values of 118.0 +- 4.1 and 83.3 +- 3.8 kJ mol~(-1) for the standard enthalpies of sublimation and vapourisation, respectively of Ni[(acac)_2en]. From the plot of log p_e against IT, the melting point was derived to be 463 K, which is in reasonable agreement with 469 +- 3 K reported in the literature and was also observed in DTA and melting point studies.