Effects of sol infiltration on the screen-printed lead zirconate titanate thick films

摘要

Ferroelectric PZT(60/40) thick films were fabricated by the screen-printing method and the PZT precursor solution was spin-coated on the thick films to obtain a densification. Structural and electrical properties of the thick films with the treatment of sol coating were investigated. The lattice constant of PZT thick films was 0.4073 nm and there is no dependence on the number of sol coatings. The thickness of PZT films obtained by one screen-printing was approximately 16 μm. The relative dielectric constant increased and dielectric loss decreased with the increase in the number of sol coatings, and the values of the 15-coated PZT-15 film were 369 and 2.16% at 1 kHz, respectively. The remanent polarization, coercive field, and breakdown strength of the PZT-15 thick film were 23.2 μC/cm~2, 18.03 kV/cm and 78 kV/cm, respectively.