Optical constants of transparent ZnO films by RF magnetron sputtering

摘要

The transparent ZnO films were deposited on quartz glass slides by RF magnetron sputtering and then the films are annealed at 500, 700, 900 ℃ for 60 min in pure O_2. The optical transmission spectra for the as-grown and annealed ZnO films have been measured over the 300 nm to 700 nm spectral region. The optical constants and thickness of the films have been determined using a nonlinear programming method suggested by Birgin et al. The optical band gap has been determined from the absorption coefficient. The optical quality of ZnO films is improved by annealing.