Selective-area growth of ZnO nanorod arrays via a sonochemical route

摘要

A simple and facile sonochemical route was described for the selective-area growth of well-aligned ZnO nanorod arrays on Si wafers under ambient conditions. ZnO nanorod arrays were selectively grown on preformed various patterns of zinc seed layer, such as letters and dots of uniform or non-uniform sizes. The average diameter and length of ZnO nanorods were 76 nm and 475 nm, respectively. The crystal structure of ZnO nanorods were investigated by transmission electron microscopy and X-ray diffraction. Based on this simple sonochemical technique, highly crystalline ZnO nanorod arrays can be selectively grown on other flat substrates with various patterned morphologies.