Synthesis of orthorhombic structure epitaxial tin oxide film

摘要

Tin oxide (SnO_2) epitaxial film has been deposited on Y-stabilized ZrO_2 (YSZ) (100) substrate by metalorganic chemical vapor deposition (MOCVD). Structural and optical properties of the film as well as the epitaxial mechanism have been investigated in detail. The results of structure analyses show that the obtained film is epitaxial SnO_2 with orthorhombic columbite structure. A novel epitaxial relationship of orthorhombic SnO_2(100)||YSZ(100) with SnO_2 [0011]||YSZ<001> was clearly observed from the interface area between the film and the substrate. The absolute average transmittance of the orthorhombic SnO_2 film in the visible range exceeds 90%, and the optical band gap of the film is about 3.79 Ev.