Electrochromic WO3 thin films prepared by combining ion-beam sputtering deposition with post-annealing

摘要

A method combining ion-beam sputtering deposition with post-annealing was proposed to prepare electrochromic WO3 thin films. It was observed that the intensity of oxygen deficiency phases can be controlled by adjusting the post-annealing temperature and time. It was also observed that as-prepared WO3 films exhibit excellent optical modulations up to 78-87%. With the increasing of oxygen deficiency intensity, the optical modulation increases accordingly. Further, the electrochromic mechanism of WO3 films was also discussed. (C) 2015 Elsevier B.V. All rights reserved.