High performance photoresponse of transparent β-Ga_2O_3 film prepared by polymer-assisted deposition

摘要

We report the study on the structural and photoelectric properties of beta-Ga2O3 films on sapphire substrates prepared by polymer-assisted deposition (PAD). The characterizations reveal that the beta-Ga2O3 films are smooth and composed of crystals with single preferential orientation of (-201). As the low defect density, the solar-blind ultraviolet (UV) photodetector based on the beta-Ga2O3 films shows highperformance photoresponse behaviors with lower dark current and faster speeds. Our results suggest that the beta-Ga2O3 films prepared by low-cost PAD have great potentials for optical and optoelectronic applications. (c) 2020 Published by Elsevier B.V.