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Effect of insulating layer structural properties for thin-film electroluminescent devices

机译:绝缘层结构特性对薄膜电致发光器件的影响

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摘要

The effect of the structural properties of a Y_2O_3 insulating layer on the structural and electroluminescent (EL) properties of a ZnS emitting layer in a thin-film EL (TFEL) device has been investigated. The ZnS:Tm thin film, which has been developed as a blue-emitting material, was used as the emitting layer in the fabricated device. The best structural and EL properties of ZnS:Tm films were obtained by maintaining the substrate temperature at 200℃ during Y_2O_3 deposition. This deposition condition yields the best crystallinity of ZnS:Tm films with [111] orientation.
机译:研究了Y_2O_3绝缘层的结构特性对薄膜EL(TFEL)器件中ZnS发射层的结构和电致发光(EL)特性的影响。已开发为发蓝色光的材料的ZnS:Tm薄膜用作制造的器件中的发光层。通过在Y_2O_3沉积过程中将衬底温度保持在200℃,可以获得ZnS:Tm薄膜的最佳结构和EL性能。该沉积条件产生具有[111]取向的ZnS:Tm薄膜的最佳结晶度。

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