Piezoelectric Multilayer Microactuators for High Track Density Hard Disk Drives

摘要

Two kinds of novel piezoelectric multilayer microactuators, called a split-morph and an annular split-morph, have been proposed and discussed for the secondary stage microactuators of the dual stage actuation systems for high track density hard disk drives. The novel piezoelectric multilayer micro-actuators possess a useful compromise performance to displacement, resonance frequency and generative force. Together with their thin plate-like features and low drive voltage, they are particularly suitable for mounting on the suspension of a head gimbal assembly or between the flexure tongue and slider as the secondary fine-tuning actuator.