Design of A Novel Micromachined Gyroscope With Compensatory Capacitance

摘要

This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensatory capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 14.2mv/°/s, theoretically.