Preparation and characterization of TiO_2/TiN/TiO_2 multi-layer solar control coatings deposited by D.C. Reactive magnetron sputtering at different substrate temperature

摘要

Transparent TiO_2/TiN/TiO_2 multi-layer solar control coatings were prepared no normal soda- lime-silica float glass substrate by using d.c. reactive magnetron sputtering at substrate temperature ranging from room temperature to 620 deg. C. The dependence of optical of the coatings and the coating composition, on the substrate temperature was studied. The results of the optical properties show that as the substrate temperature increases, a visible transmittance as high as 65/100 can be obtained.