An Active Microvibration Isolation System for Hi-tech Manufacturing Facilities

摘要

This paper presents an active microvibration isolation system using voice-coil linear motors, and pneumatic and peizoelectric actuators. This system is designed to reduce microvibation of the six degrees-of-freedom associated with the rigid body modes of the vibration isolation table by feeding back the pseudo absolute displacement and velocity of the table. To improve vibration isolation performance, a feed-forward control link is added to the sway components in each dimension.