Toward 1 Tdot/in.~2 Nanoimprint Lithography For Magnetic Bit-patterned Media: Opportunities And Challenges

摘要

Nanoimprint lithography presents unique opportunities for patterned media applications due to its advantages of sub-10 nm resolution capability, patterning of a whole disk in a single imprint step with reasonably high throughput, and the relatively low capital cost in comparison to other next generation lithography technologies. However, there are several critical issues that still remain very challenging. This article will briefly discuss these challenges in general and then focus on imprint lithography work including the fabrication of templates and demonstrate the imprinted results. In this work two types of polarities of high-density templates (pillar tone and hole tone) have been fabricated on fused silica substrates for the UV imprint process. The difficulties and limitations in each of the template fabrication processes will be discussed. The authors have successfully demonstrated template fabrication followed by imprinted results with a pitch of 24 nm (1.1 Tdots/in.~2) for both tones of templates. Initial imprinted results of dense dot patterns with a pitch as small as 18 nm (2.0 Tdots/in.~2) have been achieved. High-resolution scanning electron microscopy images are used as the primary metrology for both the dot size uniformity and the placement accuracy analysis. The difficulties and the limitations in template fabrication, the imprint process, and associated metrology will be discussed.