首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Focused In Beam Fabrication Of Metallic Nanostructures On End Faces Of Optical Fibers For Chemical Sensing Applications
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Focused In Beam Fabrication Of Metallic Nanostructures On End Faces Of Optical Fibers For Chemical Sensing Applications

机译:专注于化学传感应用中光纤端面金属纳米结构的束制造

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摘要

Focused ion beam (FIB) fabrication of fiber optic sensors, mainly chemical sensors, which are based on plasmonics-active nanostructures formed on the cleaved tips of optical fibers, is reported. The nanostructures fabricated included nanoholes in optically thick metallic films as well as metallic nanopillars and nanorods. The sensing mechanism is based on detecting shifts in surface plasmon resonances (SPRs) associated with nanoholes in metallic films and localized SPRs of metallic nanopillars and nanorods, when the refractive index of the medium surrounding the nanostructures is changed. These sensors can be employed for the detection of chemical agents in air as well as liquid media surrounding the sensors. FIB milling was employed to fabricate ordered arrays of nanoholes in optically thick (100-240 nm) metallic films deposited on cleaved end faces of multimode, four-mode, and single-mode optical fibers. Separately, metallic nanorods and nanopillars were formed by first depositing a metallic (gold or silver) film on tips of optical fibers, which was followed by FIB milling large area patterns to form freestanding nanorods and nanopillars. Utilizing FIB allows engineering nanostructure geometries, i.e., nanostructure shapes and sizes that are chosen based on the plasmon resonances associated with them. Formation of periodic arrays of nanoholes provides a means of tuning plasmon resonance peaks, associated with extraordinary transmission of light through the array of nanoholes in the metallic films, based on periodicity and shape of the nanoholes as well as on refractive index changes to form sensitive chemical sensors.
机译:据报道,聚焦于离子传感器(FIB)的光纤传感器,主要是化学传感器,其基于在光纤劈开尖端上形成的等离子体活性纳米结构。所制造的纳米结构包括光学厚度的金属膜中的纳米孔以及金属纳米柱和纳米棒。感应机制是基于当纳米结构周围的介质的折射率发生变化时,检测与金属膜中的纳米孔以及金属纳米柱和纳米棒的局部SPR相关的表面等离振子共振(SPR)的变化。这些传感器可用于检测空气中的化学试剂以及传感器周围的液体介质。 FIB铣削用于在沉积在多模,四模和单模光纤的开裂端面上的光学厚度(100-240 nm)的金属膜中制造纳米孔的有序阵列。分别通过首先在光纤尖端上沉积金属(金或银)膜来形成金属纳米棒和纳米柱,然后FIB铣削大面积图案以形成独立的纳米棒和纳米柱。利用FIB允许工程化纳米结构的几何形状,即,基于与其相关的等离子体激元共振选择的纳米结构形状和尺寸。纳米孔周期性阵列的形成提供了一种调节等离振子共振峰的方法,该共振峰基于纳米孔的周期性和形状以及折射率变化以形成敏感化学物质,从而通过金属膜中的纳米孔阵列实现非凡的光传输。传感器。

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