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首页> 外文期刊>Journal of Vacuum Science & Technology >Retention-failure mechanism of TaN/Cu_xO/Cu resistive memory with good data retention capability
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Retention-failure mechanism of TaN/Cu_xO/Cu resistive memory with good data retention capability

机译:具有良好数据保留能力的TaN / Cu_xO / Cu电阻存储器的保留失效机制

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摘要

Data retention characteristics and a failure mechanism of TaN/Cu_xO/Cu resistive memory device are investigated by a temperature-accelerated test method. Data retention capability at 85 ℃ is sufficiently longer than 10 years by using two different methods: simple extrapolation and Arrhenius equation. The high resistance state fails to low resistance state and low resistance state fails to high resistance state at the elevated temperature. It is attributed that different retention-failure mechanisms are responsible for high resistance state and low resistance state, respectively. A filament/charge trapped combined model is presented to clarify the retention-failure mechanism.
机译:通过温度加速测试方法研究了TaN / Cu_xO / Cu电阻存储器件的数据保留特性和失效机理。通过使用两种不同的方法:简单外推法和Arrhenius方程,在85℃时的数据保留能力足以超过10年。在升高的温度下,高电阻状态不能变为低电阻状态,并且低电阻状态不能变为高电阻状态。归因于,不同的保持失败机制分别负责高电阻状态和低电阻状态。提出了灯丝/电荷陷阱组合模型,以阐明保持失效机理。

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  • 来源
    《Journal of Vacuum Science & Technology》 |2009年第6期|2468-2471|共4页
  • 作者单位

    State Key Laboratory of ASIC and System Department of Microelectronics, Fudan University, Shanghai 200433, China;

    State Key Laboratory of ASIC and System Department of Microelectronics, Fudan University, Shanghai 200433, China;

    State Key Laboratory of ASIC and System Department of Microelectronics, Fudan University, Shanghai 200433, China;

    State Key Laboratory of ASIC and System Department of Microelectronics, Fudan University, Shanghai 200433, China;

    Memory Technology Development Center, Semiconductor Manufacturing International Corp., Shanghai 201203, China;

    Memory Technology Development Center, Semiconductor Manufacturing International Corp., Shanghai 201203, China;

    Memory Technology Development Center, Semiconductor Manufacturing International Corp., Shanghai 201203, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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