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首页> 外文期刊>Journal of Vacuum Science & Technology >Development of an integral optics system for a slim optical mouse in a slim portable electric device
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Development of an integral optics system for a slim optical mouse in a slim portable electric device

机译:在超薄便携式电子设备中为超薄光学鼠标开发集成光学系统

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摘要

This paper presents the development of an integral optics system for a slim optical mouse whose operation principle in light propagation is based on total internal refection to prevent image distortion. The slim optical mouse can be applied to a portable electric device which has been becoming thinner and smaller and has a variety of functions for entertainment applications. The integral optics system was designed as a combination of an illumination system with a reflector and refractor, an object system, and a lens system with array multilevel lenses for a slim optical mouse with the thickness of 2.5 mm. Fabrications were performed on photo and EB lithography, thermal evaporation by shadowing effect, FAB etching, TMAH etching, and hot embossing. The results show that this system is quite appropriate for a slim optical mouse with the measuring image performance through the lens system and light efficiency traveling to the object plane through the illumination system.
机译:本文介绍了一种用于超薄光学鼠标的集成光学系统的开发,该光学系统的光传播操作原理基于内部整体反射以防止图像失真。纤薄的光学鼠标可以应用于越来越薄,越来越小并且具有用于娱乐应用的多种功能的便携式电子设备。集成光学系统的设计是将照明系统与反射镜和折射镜,物镜系统以及具有阵列多级透镜的透镜系统(厚度为2.5 mm的超薄光学鼠标)组合在一起。在光和EB光刻,通过遮蔽效应进行热蒸发,FAB蚀刻,TMAH蚀刻和热压花的过程中进行制造。结果表明,该系统非常适合纤细的光学鼠标,它具有通过镜头系统测量图像的性能,并且光效率通过照明系统传播到物平面。

著录项

  • 来源
    《Journal of Vacuum Science & Technology》 |2009年第3期|1422-1427|共6页
  • 作者单位

    Ultraprecision System Laboratory, Department of Mechatronics, Gwangju Institute of Science and Technology (GIST), 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea;

    Department of Nanomechanics, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan;

    Ultraprecision System Laboratory, Department of Mechatronics, Gwangju Institute of Science and Technology (GIST), 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea;

    Ultraprecision System Laboratory, Department of Mechatronics, Gwangju Institute of Science and Technology (GIST), 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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