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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Electrical Investigations On Metal/ferroelectric/insulator/semiconductor Structures Using Poly[vinylidene Fluoride Trifluoroethylene] As Ferroelectric Layer For Organic Nonvolatile Memory Applications
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Electrical Investigations On Metal/ferroelectric/insulator/semiconductor Structures Using Poly[vinylidene Fluoride Trifluoroethylene] As Ferroelectric Layer For Organic Nonvolatile Memory Applications

机译:聚[偏二氟乙烯三氟乙烯]作为铁电层用于有机非易失性存储应用的金属/铁电/绝缘体/半导体结构的电学研究

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摘要

Poly[vinylidene fluoride trifluoroethylene] (P[VDF/TrFE]) is a ferroelectric polymer and a candidate for the application in a ferroelectric field effect transistor, which is considered as a nonvolatile and nondestructive readout memory cell. In this contribution the authors focus on metal/ferroelectric/insulator/semiconductor capacitor structures with P[VDF/TrFE] as ferroelectric layer. Measuring the capacitance of Al/P[VDF/TrFE]/SiO_2/Si stacks in dependence of the applied bias and analyzing the oxide capacitance in dependence of the thickness of the ferroelectric layer, they observe a formation of an interfacial nonferroelectric layer. This layer is responsible for reduced values of polarization profound for thinner P[VDF/TrFE] layers in this system. Capacitance-time measurements at such stacks show the possibility to distinguish between a higher and a lower capacitance state for more than 5 days. Long-time measurements revealed imprint and fatigue-like behavior.
机译:聚[偏二氟乙烯三氟乙烯](P [VDF / TrFE])是一种铁电聚合物,是在铁电场效应晶体管中应用的一种候选材料,被认为是一种非易失性且无损的读出存储单元。在这一贡献中,作者集中于以P [VDF / TrFE]作为铁电层的金属/铁电/绝缘体/半导体电容器结构。根据施加的偏压测量Al / P [VDF / TrFE] / SiO_2 / Si叠层的电容,并根据铁电层的厚度分析氧化物电容,他们观察到界面非铁电层的形成。对于该系统中较薄的P [VDF / TrFE]层,该层负责降低极化值。在这样的电池堆上进行的电容时间测量表明,有可能在超过5天的时间里区分较高和较低的电容状态。长时间的测量显示出烙印和类似疲劳的行为。

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