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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena >Beam-focusing characteristics of the diamond-film field emission arrays with parallel emitter, gates, and in-plane lens
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Beam-focusing characteristics of the diamond-film field emission arrays with parallel emitter, gates, and in-plane lens

机译:具有平行发射器,栅极和面内透镜的金刚石膜场发射阵列的光束聚焦特性

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摘要

A focusing structure of field-emission arrays (FEAs) made of a parallel planar emitter, gate, and in-plane lens is suggested. Using the particle-in-cell simulation code MAGIC, the diamond-film FEAs made of a strip planar emitter, a parallel gate, and an anode with and without an in-plane lens have been simulated. The electron-beam streamlines and the x-p_y phase show that the in-plane lens focuses the electron beam. For a typical model, the beam width decreases about 1/10 for every cell, and the transverse velocity decreases from +-5.5X10~6 to +-0.4X10~6 m/s when including the in-plane lens. This structure can be used as a moderated field-emission cathode to emit a collimated electron beam, such as in field-emission displays.
机译:提出了由平行平面发射器,栅极和面内透镜组成的场发射阵列(FEA)的聚焦结构。使用粒子内模拟代码MAGIC,模拟了由带状平面发射器,平行栅极以及带有和不带有平面透镜的阳极组成的金刚石薄膜FEA。电子束流线和x-p_y相表明面内透镜使电子束聚焦。对于典型模型,包括平面内透镜时,每个单元的光束宽度减小约1/10,横向速度从+ -5.5X10〜6降至+ -0.4X10〜6 m / s。这种结构可用作缓和的场发射阴极,以发射准直的电子束,例如在场发射显示器中。

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