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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structure >Electron field emission from boron nitride nanofilm and its application to graphite nanofiber
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Electron field emission from boron nitride nanofilm and its application to graphite nanofiber

机译:氮化硼纳米膜的电子场发射及其在石墨纳米纤维中的应用

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摘要

Hexagonal polycrystalline boron nitride (BN) films are synthesized on Si substrates by plasma assisted chemical vapor deposition. In the case of the BN films thicker than 20 nm, the turn-on electric field of the electron emission is strongly influenced by the surface roughness rather than the film thickness. Qn the other hand, in the case of the BN film with a thickness of 8-10 nm, it is found that the turn-on electric field as low as 8.3 V/μm is achieved in spite of the surface of the BN nanofilm being flat as well as the Si substrate. A significant reduction in the effective potential barrier height is suggested. The tunneling controlled field emission is proposed for the BN nanofilm with positive space charge. The BN nanofilm is deposited onto the graphite nanofiber sample. A significant improvement of the field emission characteristics is demonstrated.
机译:六边形多晶氮化硼(BN)膜是通过等离子辅助化学气相沉积法在Si衬底上合成的。在BN膜的厚度大于20nm的情况下,电子发射的开启电场受表面粗糙度而不是膜厚度的强烈影响。另一方面,发现在厚度为8-10nm的BN膜的情况下,尽管BN纳米膜的表面被形成,但仍可实现低至8.3V /μm的开启电场。平板以及硅基板。建议显着降低有效势垒高度。提出了具有正空间电荷的BN纳米膜的隧穿控制场发射。 BN纳米膜沉积在石墨纳米纤维样品上。证明了场发射特性的显着改善。

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