GRAPHITE NANOFIBER AND METHOD OF MANUFACTURING THE SAME, GRAPHITE NANOFIBER ELECTRON SOURCE, AND FIELD EMISSION DISPLAY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a graphite nanofiber, which can form graphite nanofibers in vertical orientation with high density and uniformly; to provide a graphite nanofiber electron source with a high output current density; and to provide a field emission display apparatus which has high current density, high brightness and large capacity.;SOLUTION: The method includes the steps of: forming a cathode electrode 10 on a substrate 18; forming an insulating film 12 on the cathode electrode 10; forming a gate electrode 14 on the insulating film 12; forming a hole 11 communicating with a surface of the cathode electrode 10 in the insulating film 12; forming a catalyst metal layer 28 on a bottom face of the hole 11; and forming the graphite nanofiber 4 in vertical orientation on the catalyst metal layer 28.;COPYRIGHT: (C)2009,JPO&INPIT