首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Molecular beam epitaxial growth of AlGaPSb and AlGaPSb/InP distributed Bragg reflectors on InP
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Molecular beam epitaxial growth of AlGaPSb and AlGaPSb/InP distributed Bragg reflectors on InP

机译:在InP上的AlGaPSb和AlGaPSb / InP分布布拉格反射器的分子束外延生长

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摘要

The molecular beam epitaxial growth of GaPSb and Ga-rich AlGaPSb nearly lattice matched to InP has been investigated. The effect of growth temperature, P flux, Ga flux, and Sb flux on the alloy P/Sb ratio was examined. The 300 K band gap of lattice-matched GaPSb was estimated to be 0.84 eV based on photoluminescence measurements, and the shift of band gap energy with Al content in AlGaPSb alloys with Al fractions of 0.03-0.04 was investigated. A conduction band offset of approximately 0.15 eV in a type-II configuration was estimated between lattice-matched Al0.04Ga0.96P0.35Sb0.65 and InP based on photoluminescence characterization of multiple quantum well structures. AlGaPSb/InP distributed Bragg reflectors (DBRs) with a stopband centered on 1550 nm were grown with excellent lattice matching and good surface morphology. A refractive index difference of 0.41 between these materials was estimated based on a fit to the DBR reflectance spectrum. (C) 2004 American Vacuum Society.
机译:研究了与InP晶格匹配的GaPSb和富含Ga的AlGaPSb的分子束外延生长。研究了生长温度,P通量,Ga通量和Sb通量对合金P / Sb比的影响。根据光致发光测量结果,晶格匹配的GaPSb的300 K带隙估计为0.84 eV,并且研究了Al含量为0.03-0.04的AlGaPSb合金中Al含量随Al的带隙能量的变化。基于多量子阱结构的光致发光特性,在晶格匹配的Al0.04Ga0.96P0.35Sb0.65和InP之间估计了II型结构中约0.15 eV的导带偏移。具有阻带以1550 nm为中心的AlGaPSb / InP分布式布拉格反射器(DBR)的生长具有出色的晶格匹配和良好的表面形态。基于与DBR反射光谱的拟合,估计这些材料之间的折射率差为0.41。 (C)2004年美国真空学会。

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