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首页> 外文期刊>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films >Pumping of methane by a low power hot‐cathode ion pump/gage
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Pumping of methane by a low power hot‐cathode ion pump/gage

机译:用低功率热阴极离子泵/压力计抽气

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摘要

Sealed‐off devices, such as evacuated solar absorbers, with long life spans (about 25 years) frequently require a means of holding down the pressure of gases like methane which are not easily pumped by getters. Required pumping speeds are not high because leak‐up rates are low, but simplicity, low power consumption, together with a means of monitoring the pressure are desirable features. To meet these requirements we have constructed a small hot‐cathode ion pump/gage similar to a small Bayard–Alpert gage and we have subjected it to accelerated life tests in methane. The device consumed less than 1 W of power in operation. After 7×10-2 Torr l of methane had been pumped and with 1 mA of emission current the pumping speed was 2×10-4 l s-1, the equilibrium pressure was 3×10-4 Torr, and the reemission of pumped gas was 6×10-8 Torr l s-1, all quantities being slowly varying functions of the quantity of methane pumped. The sensitivity factor throughout the experiment was 3.3 Torr-1.
机译:密封装置,例如抽空的太阳能吸收器,具有长寿命(约25年),通常需要一种方法来抑制甲烷等气体的压力,而这些气体很难被吸气剂泵出。所需的抽速不高,因为泄漏率低,但是简单,低功耗以及监视压力的方法是理想的功能。为了满足这些要求,我们构造了类似于小型Bay​​ard-Alpert规的小型热阴极离子泵/规,并对其进行了甲烷加速寿命测试。该设备在运行中消耗的功率不到1W。抽出7×10-2 Torr / l的甲烷后,在发射电流为1 mA的情况下,抽气速度为2×10-4 l,s-1,平衡压力为3×10-4 r,重新排放气体为6×10-8 Torr lss-1,所有数量都是甲烷泵送量的缓慢变化函数。在整个实验中,灵敏度系数为3.3 Torr-1。

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